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Fundamentals of microfabrication / Marc Madou.

By: Material type: TextTextPublication details: Boca Raton, Fla. : CRC Press, c1997.Description: 589 p., [22] p. of plates : ill. (some col.) ; 29 cmISBN:
  • 0849394511 (acidfree paper)
Subject(s): DDC classification:
  • 621.3815/2 20
LOC classification:
  • TK7836 .M33 1997
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Includes bibliographical references (p. 565-569) and index.

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