Fundamentals of microfabrication /
Madou, Marc J.
Fundamentals of microfabrication / Marc Madou. - Boca Raton, Fla. : CRC Press, c1997. - 589 p., [22] p. of plates : ill. (some col.) ; 29 cm.
Includes bibliographical references (p. 565-569) and index.
0849394511 (acidfree paper)
96043344
Microelectronics.
Integrated circuits--Design and construction.
Microelectromechanical systems--Design and construction.
Machining.
Microelectronic packaging.
Lasers--Industrial applications.
TK7836 / .M33 1997
621.3815/2
Fundamentals of microfabrication / Marc Madou. - Boca Raton, Fla. : CRC Press, c1997. - 589 p., [22] p. of plates : ill. (some col.) ; 29 cm.
Includes bibliographical references (p. 565-569) and index.
0849394511 (acidfree paper)
96043344
Microelectronics.
Integrated circuits--Design and construction.
Microelectromechanical systems--Design and construction.
Machining.
Microelectronic packaging.
Lasers--Industrial applications.
TK7836 / .M33 1997
621.3815/2