TY  - BOOK
AU  - Plummer,James D.
AU  - Deal,Michael D.
AU  - Griffin,Peter B.
TI  - Silicon VLSI technology: fundamentals, practice, and modeling 
SN  - 9788131726044 (Pbk)
AV  - TK7874.75 .P54 2000
U1  - 621.395 P73S 23
PY  - 2009///
CY  - Noida
PB  - Pearson Education
KW  - Integrated circuits
KW  - Very large scale integration
KW  - Design and construction
KW  - Silicon
KW  - Silicon oxide films
KW  - Metal oxide semiconductors
KW  - Silicon-on-insulator technology
N1  - Includes bibliographical references and index
ER  -