TY  - BOOK
AU  - O'hanlon,John F.
TI  - Users guide to vacuum technology
SN  - 9780471270522
U1  - 621.55 OH1U3 
PY  - 2003///
CY  - New Jersey
PB  - John Wiley and Sons
KW  - Vacuum technology
KW  - Gas properties
KW  - Residual gas analyzers
ER  -