TY  - BOOK
AU  - Barnat,Edward V.
AU  - Lu,Toh-Ming
TI  - Pulsed and pulsed bias sputtering principles and applications
SN  - 9781402075438
U1  - 621.38152P 
PY  - 2003///
CY  - Massachusetts
PB  - Kluwer Academic Publishers
KW  - Optical materials
KW  - Thin films
KW  - Cathode sputtering-Plating process
KW  - Polymers
KW  - Physical organic chemistry
ER  -