Microsystem design
Senturia, Stephen D.
Microsystem design Stephen D. Senturia. - New Delhi : Springer India Pvt. Ltd., 2015. - xxvi, 689 p. : ill. ; 24 cm.
Includes bibliographical references (p. [665]-676) and index.
9788181285461 (Pbk) = EECS-rreference book collection
00048768
Microelectromechanical systems--Design and construction.
System design.
Microelectronics.
TK7875 / .S46 2000
621.3 Se59M
Microsystem design Stephen D. Senturia. - New Delhi : Springer India Pvt. Ltd., 2015. - xxvi, 689 p. : ill. ; 24 cm.
Includes bibliographical references (p. [665]-676) and index.
9788181285461 (Pbk) = EECS-rreference book collection
00048768
Microelectromechanical systems--Design and construction.
System design.
Microelectronics.
TK7875 / .S46 2000
621.3 Se59M