Introduction to microelectronic fabrication
Jaeger, Richard C.
Introduction to microelectronic fabrication Richard C. Jaeger. - 2nd ed. - Upper Saddle River, N.J. : Prentice Hall, c2002. - xiv, 316 p. : ill. ; 24 cm. - Modular series on solid state devices ; v. 5 . - Modular series on solid state devices (Upper Saddle River, N.J.) ; v. 5. .
Includes bibliographical references and index.
0201444941 9780201444940 (Pbk) = EECS-reference book collection
2002276015
Integrated circuits--Very large scale integration--Design and construction--Textbooks.
Microelectronic
Fabrication
TK7874 / .J33 2002
621.395 J17I2
Introduction to microelectronic fabrication Richard C. Jaeger. - 2nd ed. - Upper Saddle River, N.J. : Prentice Hall, c2002. - xiv, 316 p. : ill. ; 24 cm. - Modular series on solid state devices ; v. 5 . - Modular series on solid state devices (Upper Saddle River, N.J.) ; v. 5. .
Includes bibliographical references and index.
0201444941 9780201444940 (Pbk) = EECS-reference book collection
2002276015
Integrated circuits--Very large scale integration--Design and construction--Textbooks.
Microelectronic
Fabrication
TK7874 / .J33 2002
621.395 J17I2