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Pulsed and pulsed bias sputtering principles and applications

Barnat, Edward V.

Pulsed and pulsed bias sputtering principles and applications Edward V. Barnat and Toh-Ming Lu. - Massachusetts : Kluwer Academic Publishers, 2003. - x, 155 p.

ISBN: 9781402075438

Subjects--Topical Terms:
Optical materials.
Thin films.
Cathode sputtering-Plating process.
Polymers.
Physical organic chemistry.

Dewey Class. No.: 621.38152P

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